Description
Specification
Application wafers : 6″, 8″ or 8″, 12”
UPH : 100 wafer/hr (8″, 12″)
[Based on UV time 5 sec]
Main controller : PLC
Data & GUI : PC
UV Irradiation speciation;
- 365nm wave
- High Pressure mercury lamp
- 100~1000 mj/㎠ dosage
- Lamp life time 1000 hr
- Ring blower
- UV Sensor
Options (Add-Ons)
- HEPA filter
- Ink marking
- Scanner
- Tape expanding function
- GEM interface
Reviews
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