Description
Wafer sorting system for packing & unpacking wafers
-. Application wafer: 6”,8” or 8”, 12”
-. UPH :
coin jar to cassette 70 wafer/hr
cassette to cassette 100 wafer/hr
-. Main controller: PLC
-. Data & GUI: PC
-. Wafer center accuracy: +/-0.5mm
-. Ability to transfer wafers between
coin jar box and cassette
-. Coin jar box maker : e-pak, entergrice
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